Abstract. In this paper we consider an optimal control problem for film growth associated with the manufacture of nanoscale materials. The goal of this work is to investigate the applicability of optimization based methods to such problems. The results presented here indicate that it is possible to control the growth process by a time varying flux provided the time interval is not too large.
Computational methods for identification and control of nanoscale materials
John A. Burns, Belinda B. King and Oliver Stein